Developing Autonomous Distributed Intelligent MEMS/NEMS Platform for Monitoring of Critical Systems
Walied A. Moussa, P.Eng, Ph.D.
Professor Director of the MEMS/NEMS Advanced Design Lab (MEMS/NEMS ADL), Department of Mechanical Engineering, University of Alberta, Canada
Over the last two decade, Micro-electro-mechanical-systems (MEMS)-based sensory solutions were sought as an alternative to bridge this sensory gap with its rapid R&D progression in academia and industry due to the new fabrication methods derived from semiconductor integrated circuit (IC) manufacturing industry. Today, many MEMS-based devices have matured into products that are deployed into various industrial applications, such as integrated multi sensor modules (sensing strain, force, pressure, inertia, gas, temperature, and flow), actuators (inkjet nozzles, digital mirror displays), communication components (oscillators, RF filters, duplexers), and other transducers (energy harvesters and CMUT). With this, it is important to utilizes this remarkable impact of MEMS devices in various markets, which is caused by their typical small size and enabling them to be minimally invasive into larger systems (Automotive, airplanes, infrastructures, pipelines, environmental and health care) and implementable in portable, ubiquitous electronics with a cost-efficient structure. These features is now paving the road for yet another scaling of MEMS into Nano-electro-mechanical-systems (NEMS) for superior performance, functionality, power consumption, cost and size. Developing the next generation of Intelligent NEMS platform to autonomously monitor the health of critical systems (ADiMEMS/NEMS) is the objective of the MEMS/NEMS Advanced Design Lab (MEMS/NEMS ADL) at U. of A. to significantly reduce the failure impact on global economy and create an innovative frontier for adaptive sensory technology with an opportunity to be part of the solution to reduce the rate of critical system failure globally.
The MEMS/NEMS ADL is a unique facility that complements the world class NANOFAB facility at the U. of A. and focuses on the design, development, testing, packaging and commercialization of MEMS/NEMS devices for smart monitoring application of critical systems in Energy, Aerospace, Automotive, Civil, Environmental and Biomedical fields
Dr. Walied Moussa is a professor in Mechanical Engineering Department at the Faculty of Engineering with appointment in the Faculty of Medicine and Biomedical faculties. He is the director of the MEMS/NEMS ADL located in the Canadian National Institute council (NRC) for Nano Technology (NINT) at the U. of A. His research is focused on the development, design and prototyping techniques applied to MEMS/NEMS sensors and actuators used in monitoring of critical systems. Dr. Moussa’ research team of 15 researchers has received numerous national and international honors and award, and has published with his collaborating researchers more than 150 publications, including journal, conference papers and 100 patents.