Facilites

Mechatronics and Robotics Lab.

• Robot Arm
• Aerial Vehicle
• Humanoid Robot Kit
• Universal Mechanism Kit
• Pneumatics and Electro-Pneumatics System
• DC Transport System Workstation
• AC Transport System Workstation
• Sorting Station
• Assembly Station
• Processing Station
• Testing Station
• Handling Station
• Storage Station
• Routing Station
• Buffering Station
• Disassembly by Robot Station
• Production Line with ¾ Subsystems
• Robot Technology for Mechatronics Applications
• IMS Sensor Case
• IMS Virtual Package
• Robot Modules
• The phantom premium (Haptic device)
• Stewart Platform
• SCARA Robot
• Staubli 6-axis robot
• Denso robot
• IMS sensor case
• KONDO Humanoid robot Kit

Automatic Control Lab.

• Analog and Digital DC Servo System
• Magnetic Levitation System
• Digital Pendulum
• Coupled Tanks System
• Level/Flow Process Control
• Ball & Beam Apparatus
• Allen Bradley PLC Trainer
• Siemens PLC Trainer
• PLC Trainer A
• PLC Trainer B
• Cartesian Robot XYZ
• Ball and Plate
• Developer Kit

Vibration Lab.

• Universal Vibration Apparatus
• Whirling of Shafts Apparatus
• Dynamic Balancing Machine
• Impact Test Hammer
• Machinery Diagnostic System
• Computerized Vibration Analyzer

MEMS Lab.

• Deep Reactive Ion Etching System (DRIE)
• General Equipment for Clean Room
• Clean room facility
• Ultrasonic wire bonder
• Dicing saw
• Fluorescence microscope
• Drying oven
• Direct Laser Write Lithography System
• Sputtering and thermal evaporation system
• Spin coater
• Fume hood
• Deionized (DI) water system
• Nitrogen gas generation machine
• Digital aluminum-top hotplates with stirrers
• Water chiller unit
• Ultrasonic cleaner
• MASKLESS ALIGNER lithography machine
• SAMCO DRIE (Dry etching)
• Nanovak® NVTS-400-2TH2SP Thermal & Sputter Combined System
• Fully automatic computer touch screen panel control with real time LCD displays
• UV-blocking, front observation window, rotatable shutter. Shutter-thickness control via PC.
• RF Power supply, 13.6 Mhz, 300
• 10^-8 torr base pressure level, 10-7 Torr vacuum level in one hour, for fully loaded system
• Turbomoleculer + Mechanical pump, and dry pump as desired, 5-30 m3/h pumping speed
• 2-30 rpm sample rotation unit, continuous adjustment ability, panel-PC control
• 0,1Å/s dual-channel precision thickness-rate measuring unit with two QCM’s,
• RF magnetron sputter sources (2”).
• 2000W thermal evaporator
• Digital Mass flow meter controled gas inputs (Ar, N2, O2, He, CH4, H2 ), easy mix of gases, 0.2 SCCM sensitivity, panel or PC control
• Heidelberg Instruments® uPG-101 Laser Lithography System
• The μPG 101 is a Tabletop micro pattern generator for direct writing applications and low volume mask making.
• Substrates up to 6“ x 6“
• Structures down to 1 μm
• Address grid down to 50 nm
• Real time auto focus system
• Standard or UV diode laser source
• Exchangeable write modes
• Camera system for alignment
• Multiple data input formats
• Kulicke and soffa 4700AD Ball and Wedge Wire Bonding machine
• Wedge-wedge and ball-wedge bonding
• 90-degree deepaccess wedge bonding with 12.5 mm “z” axis travel
• 2 channel independent bonding parameter
• Semi-auto and manual Z bonding modes.
• Spin coater
• The Laurell WS-650-23 B spin coater is compact and packed with advanced features.
• Accommodate up to ø150mm wafers and 5" × 5" (127mm × 127mm) substrates,
• Maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).
• Fluorescent Microscope
• Professional trinocular Infinity Plan
• 30 degree inclined trinocular head
• 30W transmitted halogen light and 100W EPI-fluorescent illumination.
• Infinite Plan fluorescent objectives: 10X, 20X, 40X(S) & 100X (S, Oil)
• Uses B, G wave bands.
• It is a great microscope for biology, medicine, immunology, oncology, genetics, and materials science applications
• Ultrasonic cleaner
• Two frequencies 40 Khz and 59 Hhz,
• heating from 20° C to 80° C
• Acoustic alarm which starts when the temperature exceeds the set values.
• NiGen MICRO Nitrogen generator
• A nitrogen generator with an output pressure 0-6 bar
• Purity 99.95%
• Pure and ultrapure water system power max series
• A deionized ultra-pure water purifier
• Resistivity 18.3 Ohm.cm
• OVEN STF-N 52 NATURAL VENTILATION
• Natural ventilation oven with maximum temperature of 300 °C.
• msh-20d Digital Hotplate with magnetic stirrer
• Ceramic-Coated Plate,
• up to 380℃, ±0.3℃, with Digital Feedback Control,80 ~ 1,500 rpm.
• 180×180mm Plate
• Baisch Egypt® fume hood
• 150 cm width
• Probe Station
• PCB machine
• Function Generator
• Spectrum Analyzer
• Oscilloscope
• Vector Network Analyzer
• Signal Generator
• ZigBee Development Kit
• Signal Source Analyzer
• Dual Channel Power Meter
• ADS 2016 Software
• Cadence Software

Sensors and Actuators Lab.

• Digital Phosphor Oscilloscope
• Arbitrary Function Generator
• Multimeter
• Electronics Parts B
• Electronics Parts C
• Electronics Parts D
• Electronics Parts E
• Virtual Reality Kit with Head Set